Inserting dome shape microstructure for enhancement of ultraviolet photodetector performance of n-ZnO nanorods/p-Si heterojunction

A mixed intermediate layer of silica and zinc oxide (SZO) with architecturally dome-shaped microstructure is fabricated and characterized by combining a hydrothermal method and a plasma-enhanced chemical vapor deposition technique. Our results demonstrated that 200 °C was an optimum deposition tempe...

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Veröffentlicht in:Journal of alloys and compounds 2020-05, Vol.823, p.153884, Article 153884
Hauptverfasser: Ko, Kang Bok, Ryu, Beo Deul, Han, Min, Hong, Chang-Hee, Doan, Tuan Anh, Cuong, Tran Viet
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container_start_page 153884
container_title Journal of alloys and compounds
container_volume 823
creator Ko, Kang Bok
Ryu, Beo Deul
Han, Min
Hong, Chang-Hee
Doan, Tuan Anh
Cuong, Tran Viet
description A mixed intermediate layer of silica and zinc oxide (SZO) with architecturally dome-shaped microstructure is fabricated and characterized by combining a hydrothermal method and a plasma-enhanced chemical vapor deposition technique. Our results demonstrated that 200 °C was an optimum deposition temperature for dome shape architecture SZO layer, acting as an antireflection layer in the ultraviolet range and buffer layer for growth ZnO nanorods (NRs) arrays. Consequently, at 2.0 V reverse bias, the photo-to-dark current ratio measured with an p-Si/n-ZnONRs photodiode employing the dome-shaped SZO layer is improved by almost three orders of magnitude in the ultraviolet range as compared to that under visible-light illumination. •Architecturally dome-shaped microstructures.•Combining a hydrothermal method and a plasma-enhanced chemical vapor deposition technique.•Intermediate layer for antireflection in the ultraviolet region.
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subjects Buffer layers
Dark current
Domes
Domes (structural forms)
Heterojunctions
Hydrothermal growth
Microstructure
Nanorods
Photodiodes
Plasma enhanced chemical vapor deposition
Silicon dioxide
Ultraviolet detectors
Zinc oxide
Zinc oxides
ZnO nanorods
title Inserting dome shape microstructure for enhancement of ultraviolet photodetector performance of n-ZnO nanorods/p-Si heterojunction
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