Finite Element Modeling of the Membrane Module

The design and size of the membrane module package have a significant impact on its characteristics. It is necessary to use the finite element modeling calculation of the frequency response of the membrane module’s membrane due to the complexity of the package design. In this study the method of the thin dielectric membrane modeling by the structural and acoustic analysis in the ANSYS software is proposed. This method allows us to perform the calculation taking into account the influence of the front and back chamber size. The dependences of resonance frequency of the front chamber and back chamber on its geometric sizes are obtained. It is shown that by increasing the back chamber size, the value of the membrane sensitivity approaches its value in the open space. The membrane modules’ frequency response is compared and it shown that the presence of the front and back chambers significantly affects the values of the resonance frequency and sensitivity. The method of setting residual stresses in the membrane using thermal impact is used. A complicatedly deformed state of the membrane, called the buckling effect, is obtained. The dielectric membrane’s sensitivity with allowance for the buckling effect is calculated. The results are analyzed and it is shown that the calculated sensitivity of the membrane taking the buckling effect into account has a good coincidence with the measurement results. The proposed method enables us to calculate the membrane module’s frequency response taking the influence of the package design’s peculiarities into account and also the residual stresses in the membrane. The use of structural-acoustic analysis enables us to achieve more accurate results while calculating the membrane frequency response, which increases the efficiency of designing the acoustic pressure transducers, and ensures achieving the product’s optimal characteristics.