Layer Crystallization in PZT/LNO/Si Heterostructures

A Pb(Zr 0.52 Ti 0.48 )O 3 –LaNiO 3 –Si composition and LaNiO 3 thin films are synthesized using chemical solution deposition and studied by transmission electron microscopy. The polycrystalline, porous structure of LaNiO 3 is found to misalign the columnar structure of lead zirconate titanate. The e...

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Veröffentlicht in:	Physics of the solid state 2019-12, Vol.61 (12), p.2464-2467
Hauptverfasser:	Atanova, A. V., Zhigalina, O. M., Khmelenin, D. N., Seregin, D. S., Vorotilov, K. A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Annealing Chemical synthesis Columnar structure Crystallization Dielectric films Heat treatment Heterostructures Lanthanum Lanthanum oxides Lead zirconate titanates Misalignment Organic chemistry Perovskite Phase composition Physics Physics and Astronomy Porosity Silicon Solid State Physics Surface Physics and Thin Films Thin films
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Beschreibung
Zusammenfassung:	A Pb(Zr 0.52 Ti 0.48 )O 3 –LaNiO 3 –Si composition and LaNiO 3 thin films are synthesized using chemical solution deposition and studied by transmission electron microscopy. The polycrystalline, porous structure of LaNiO 3 is found to misalign the columnar structure of lead zirconate titanate. The effect that thermal treatment has on the structure and phase composition of lanthanum nickelate is addressed. The morphological features of LaNiO 3 film structure such as its layered character, porosity, and misalignment are observed in samples subjected to annealing at a temperature of 550°C and are more pronounced upon raising the temperature to 800°C.
ISSN:	1063-7834 1090-6460
DOI:	10.1134/S1063783419120035