Surface Morphology, Microstructure, and Piezoelectric Response of Perovskite Islands in Lead Zirconate Titanate Thin Films

Surface Morphology, Microstructure, and Piezoelectric Response of Perovskite Islands in Lead Zirconate Titanate Thin Films

Features of the microstructure and piezoelectric response of perovskite islands in a pyrochlore phase matrix in lead zirconate titanate thin films prepeared by the radio-frequency magnetron sputtering method are investigated. The radial inhomogeneity of the surface morphology and piezoresponse of th...

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Veröffentlicht in:Physics of the solid state 2019-12, Vol.61 (12), p.2376-2381
Hauptverfasser: Pronin, I. P., Kaptelov, E. Yu, Senkevich, S. V., Kiselev, D. A., Osipov, V. V., Pronin, V. P.
Format: Artikel
Sprache:eng
Schlagworte:
Dielectric films
Ferroelectricity
Inhomogeneity
Islands
Lead compounds
Lead zirconate titanates
Magnetron sputtering
Microstructure
Morphology
Perovskite
Perovskites
Physics
Physics and Astronomy
Piezoelectricity
Silicon substrates
Solid State Physics
Thin films
Zirconium
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Zusammenfassung:Features of the microstructure and piezoelectric response of perovskite islands in a pyrochlore phase matrix in lead zirconate titanate thin films prepeared by the radio-frequency magnetron sputtering method are investigated. The radial inhomogeneity of the surface morphology and piezoresponse of the islands are revealed. The role of two-dimensional mechanical stresses acting on the thin film from the silicon substrate side is discussed.
ISSN:1063-7834
1090-6460
DOI:10.1134/S1063783419120424