Evaluation of diamond mosaic wafer crystallinity by electron backscatter diffraction

A mosaic substrate is a promising candidate to create large size single crystal diamonds for various types of applications. In this study, the crystal orientations of the joint areas of four single crystal plates of a mosaic substrate were measured using the high resolution electron backscatter diff...

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Veröffentlicht in:	Diamond and related materials 2020-01, Vol.101, p.107558, Article 107558
Hauptverfasser:	Matsushita, Akio, Fujimori, Naoji, Tsuchida, Yuki, Ohtani, Noboru, Dojima, Daichi, Koide, Kazunori, Kaneko, Tadaaki, Shikata, Shinichi
Format:	Artikel
Sprache:	eng
Schlagworte:	Crystal structure Diamond Diamonds Dislocation Dislocation vector Electron backscatter diffraction Power device Rotation Single crystals Substrates X-ray topography
Online-Zugang:	Volltext
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