Evaluation of diamond mosaic wafer crystallinity by electron backscatter diffraction

A mosaic substrate is a promising candidate to create large size single crystal diamonds for various types of applications. In this study, the crystal orientations of the joint areas of four single crystal plates of a mosaic substrate were measured using the high resolution electron backscatter diffraction method. The lattice rotation of [110] to [–110] (X-Y direction) was less than 0.5° and the lattice rotation mappings of [001] to [110] (Z-X direction) and [1–10] (Z-Y direction) were less than 0.2°. Considering that plate alignment is not particularly considered during the fabrication process, further improvement can be expected to realize a well- aligned mosaic substrate. [Display omitted] •The lattice rotations of the joint areas of four single crystal plates of a mosaic substrate were less than 0.5°.