Evaluation of diamond mosaic wafer crystallinity by electron backscatter diffraction
A mosaic substrate is a promising candidate to create large size single crystal diamonds for various types of applications. In this study, the crystal orientations of the joint areas of four single crystal plates of a mosaic substrate were measured using the high resolution electron backscatter diff...
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| Veröffentlicht in: | Diamond and related materials 2020-01, Vol.101, p.107558, Article 107558 |
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| container_title | Diamond and related materials |
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| creator | Matsushita, Akio Fujimori, Naoji Tsuchida, Yuki Ohtani, Noboru Dojima, Daichi Koide, Kazunori Kaneko, Tadaaki Shikata, Shinichi |
| description | A mosaic substrate is a promising candidate to create large size single crystal diamonds for various types of applications. In this study, the crystal orientations of the joint areas of four single crystal plates of a mosaic substrate were measured using the high resolution electron backscatter diffraction method. The lattice rotation of [110] to [–110] (X-Y direction) was less than 0.5° and the lattice rotation mappings of [001] to [110] (Z-X direction) and [1–10] (Z-Y direction) were less than 0.2°. Considering that plate alignment is not particularly considered during the fabrication process, further improvement can be expected to realize a well- aligned mosaic substrate.
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•The lattice rotations of the joint areas of four single crystal plates of a mosaic substrate were less than 0.5°. |
| doi_str_mv | 10.1016/j.diamond.2019.107558 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_journals_2354308644</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><els_id>S0925963519306521</els_id><sourcerecordid>2354308644</sourcerecordid><originalsourceid>FETCH-LOGICAL-c318t-565825456805ba35e92c2524d6a9bdd1e176f855074157d88877a7cf6c5e38143</originalsourceid><addsrcrecordid>eNqFkF1LwzAYhYMoOKc_QSh43ZmkfZP0SmT4BQNv5nVI8wGpXTOTbNJ_b0d379ULh3Oel3MQuid4RTBhj93KeLULg1lRTJpJ4wDiAi2I4E2JMaOXaIEbCmXDKrhGNyl1GBPa1GSBti9H1R9U9mEogivOoGIXkvK6-FXOxkLHMWXV937weSzasbC91TlOiVbp76RVzpPLeOei0ifSLbpyqk_27nyX6Ov1Zbt-Lzefbx_r502pKyJyCQwEhRqYwNCqCmxDNQVaG6aa1hhiCWdOAGBeE-BGCMG54toxDbYSpK6W6GHm7mP4OdiUZRcOcZheSlpBXWHB6pMLZpeOIaVondxHv1NxlATL04Cyk-fe8jSgnAecck9zzk4Vjt5GmbS3g7bGx6m_NMH_Q_gDHLx70w</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>2354308644</pqid></control><display><type>article</type><title>Evaluation of diamond mosaic wafer crystallinity by electron backscatter diffraction</title><source>Elsevier ScienceDirect Journals Complete</source><creator>Matsushita, Akio ; Fujimori, Naoji ; Tsuchida, Yuki ; Ohtani, Noboru ; Dojima, Daichi ; Koide, Kazunori ; Kaneko, Tadaaki ; Shikata, Shinichi</creator><creatorcontrib>Matsushita, Akio ; Fujimori, Naoji ; Tsuchida, Yuki ; Ohtani, Noboru ; Dojima, Daichi ; Koide, Kazunori ; Kaneko, Tadaaki ; Shikata, Shinichi</creatorcontrib><description>A mosaic substrate is a promising candidate to create large size single crystal diamonds for various types of applications. In this study, the crystal orientations of the joint areas of four single crystal plates of a mosaic substrate were measured using the high resolution electron backscatter diffraction method. The lattice rotation of [110] to [–110] (X-Y direction) was less than 0.5° and the lattice rotation mappings of [001] to [110] (Z-X direction) and [1–10] (Z-Y direction) were less than 0.2°. Considering that plate alignment is not particularly considered during the fabrication process, further improvement can be expected to realize a well- aligned mosaic substrate.
[Display omitted]
•The lattice rotations of the joint areas of four single crystal plates of a mosaic substrate were less than 0.5°.</description><identifier>ISSN: 0925-9635</identifier><identifier>EISSN: 1879-0062</identifier><identifier>DOI: 10.1016/j.diamond.2019.107558</identifier><language>eng</language><publisher>Amsterdam: Elsevier B.V</publisher><subject>Crystal structure ; Diamond ; Diamonds ; Dislocation ; Dislocation vector ; Electron backscatter diffraction ; Power device ; Rotation ; Single crystals ; Substrates ; X-ray topography</subject><ispartof>Diamond and related materials, 2020-01, Vol.101, p.107558, Article 107558</ispartof><rights>2019 Elsevier B.V.</rights><rights>Copyright Elsevier BV Jan 2020</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c318t-565825456805ba35e92c2524d6a9bdd1e176f855074157d88877a7cf6c5e38143</citedby><cites>FETCH-LOGICAL-c318t-565825456805ba35e92c2524d6a9bdd1e176f855074157d88877a7cf6c5e38143</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://www.sciencedirect.com/science/article/pii/S0925963519306521$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>314,776,780,3537,27901,27902,65306</link.rule.ids></links><search><creatorcontrib>Matsushita, Akio</creatorcontrib><creatorcontrib>Fujimori, Naoji</creatorcontrib><creatorcontrib>Tsuchida, Yuki</creatorcontrib><creatorcontrib>Ohtani, Noboru</creatorcontrib><creatorcontrib>Dojima, Daichi</creatorcontrib><creatorcontrib>Koide, Kazunori</creatorcontrib><creatorcontrib>Kaneko, Tadaaki</creatorcontrib><creatorcontrib>Shikata, Shinichi</creatorcontrib><title>Evaluation of diamond mosaic wafer crystallinity by electron backscatter diffraction</title><title>Diamond and related materials</title><description>A mosaic substrate is a promising candidate to create large size single crystal diamonds for various types of applications. In this study, the crystal orientations of the joint areas of four single crystal plates of a mosaic substrate were measured using the high resolution electron backscatter diffraction method. The lattice rotation of [110] to [–110] (X-Y direction) was less than 0.5° and the lattice rotation mappings of [001] to [110] (Z-X direction) and [1–10] (Z-Y direction) were less than 0.2°. Considering that plate alignment is not particularly considered during the fabrication process, further improvement can be expected to realize a well- aligned mosaic substrate.
[Display omitted]
•The lattice rotations of the joint areas of four single crystal plates of a mosaic substrate were less than 0.5°.</description><subject>Crystal structure</subject><subject>Diamond</subject><subject>Diamonds</subject><subject>Dislocation</subject><subject>Dislocation vector</subject><subject>Electron backscatter diffraction</subject><subject>Power device</subject><subject>Rotation</subject><subject>Single crystals</subject><subject>Substrates</subject><subject>X-ray topography</subject><issn>0925-9635</issn><issn>1879-0062</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2020</creationdate><recordtype>article</recordtype><recordid>eNqFkF1LwzAYhYMoOKc_QSh43ZmkfZP0SmT4BQNv5nVI8wGpXTOTbNJ_b0d379ULh3Oel3MQuid4RTBhj93KeLULg1lRTJpJ4wDiAi2I4E2JMaOXaIEbCmXDKrhGNyl1GBPa1GSBti9H1R9U9mEogivOoGIXkvK6-FXOxkLHMWXV937weSzasbC91TlOiVbp76RVzpPLeOei0ifSLbpyqk_27nyX6Ov1Zbt-Lzefbx_r502pKyJyCQwEhRqYwNCqCmxDNQVaG6aa1hhiCWdOAGBeE-BGCMG54toxDbYSpK6W6GHm7mP4OdiUZRcOcZheSlpBXWHB6pMLZpeOIaVondxHv1NxlATL04Cyk-fe8jSgnAecck9zzk4Vjt5GmbS3g7bGx6m_NMH_Q_gDHLx70w</recordid><startdate>202001</startdate><enddate>202001</enddate><creator>Matsushita, Akio</creator><creator>Fujimori, Naoji</creator><creator>Tsuchida, Yuki</creator><creator>Ohtani, Noboru</creator><creator>Dojima, Daichi</creator><creator>Koide, Kazunori</creator><creator>Kaneko, Tadaaki</creator><creator>Shikata, Shinichi</creator><general>Elsevier B.V</general><general>Elsevier BV</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7SR</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope></search><sort><creationdate>202001</creationdate><title>Evaluation of diamond mosaic wafer crystallinity by electron backscatter diffraction</title><author>Matsushita, Akio ; Fujimori, Naoji ; Tsuchida, Yuki ; Ohtani, Noboru ; Dojima, Daichi ; Koide, Kazunori ; Kaneko, Tadaaki ; Shikata, Shinichi</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c318t-565825456805ba35e92c2524d6a9bdd1e176f855074157d88877a7cf6c5e38143</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2020</creationdate><topic>Crystal structure</topic><topic>Diamond</topic><topic>Diamonds</topic><topic>Dislocation</topic><topic>Dislocation vector</topic><topic>Electron backscatter diffraction</topic><topic>Power device</topic><topic>Rotation</topic><topic>Single crystals</topic><topic>Substrates</topic><topic>X-ray topography</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Matsushita, Akio</creatorcontrib><creatorcontrib>Fujimori, Naoji</creatorcontrib><creatorcontrib>Tsuchida, Yuki</creatorcontrib><creatorcontrib>Ohtani, Noboru</creatorcontrib><creatorcontrib>Dojima, Daichi</creatorcontrib><creatorcontrib>Koide, Kazunori</creatorcontrib><creatorcontrib>Kaneko, Tadaaki</creatorcontrib><creatorcontrib>Shikata, Shinichi</creatorcontrib><collection>CrossRef</collection><collection>Engineered Materials Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><jtitle>Diamond and related materials</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Matsushita, Akio</au><au>Fujimori, Naoji</au><au>Tsuchida, Yuki</au><au>Ohtani, Noboru</au><au>Dojima, Daichi</au><au>Koide, Kazunori</au><au>Kaneko, Tadaaki</au><au>Shikata, Shinichi</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Evaluation of diamond mosaic wafer crystallinity by electron backscatter diffraction</atitle><jtitle>Diamond and related materials</jtitle><date>2020-01</date><risdate>2020</risdate><volume>101</volume><spage>107558</spage><pages>107558-</pages><artnum>107558</artnum><issn>0925-9635</issn><eissn>1879-0062</eissn><abstract>A mosaic substrate is a promising candidate to create large size single crystal diamonds for various types of applications. In this study, the crystal orientations of the joint areas of four single crystal plates of a mosaic substrate were measured using the high resolution electron backscatter diffraction method. The lattice rotation of [110] to [–110] (X-Y direction) was less than 0.5° and the lattice rotation mappings of [001] to [110] (Z-X direction) and [1–10] (Z-Y direction) were less than 0.2°. Considering that plate alignment is not particularly considered during the fabrication process, further improvement can be expected to realize a well- aligned mosaic substrate.
[Display omitted]
•The lattice rotations of the joint areas of four single crystal plates of a mosaic substrate were less than 0.5°.</abstract><cop>Amsterdam</cop><pub>Elsevier B.V</pub><doi>10.1016/j.diamond.2019.107558</doi></addata></record> |
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| language | eng |
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| source | Elsevier ScienceDirect Journals Complete |
| subjects | Crystal structure Diamond Diamonds Dislocation Dislocation vector Electron backscatter diffraction Power device Rotation Single crystals Substrates X-ray topography |
| title | Evaluation of diamond mosaic wafer crystallinity by electron backscatter diffraction |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-12T17%3A47%3A50IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Evaluation%20of%20diamond%20mosaic%20wafer%20crystallinity%20by%20electron%20backscatter%20diffraction&rft.jtitle=Diamond%20and%20related%20materials&rft.au=Matsushita,%20Akio&rft.date=2020-01&rft.volume=101&rft.spage=107558&rft.pages=107558-&rft.artnum=107558&rft.issn=0925-9635&rft.eissn=1879-0062&rft_id=info:doi/10.1016/j.diamond.2019.107558&rft_dat=%3Cproquest_cross%3E2354308644%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=2354308644&rft_id=info:pmid/&rft_els_id=S0925963519306521&rfr_iscdi=true |