Structural analysis of hydrogenated nano-crystalline silicon suboxide (nc-SiOx:H, x < 1) thin films with SAXS for a potential application as phase change material

Structural analysis of hydrogenated nano-crystalline silicon suboxide (nc-SiOx:H, x < 1) thin films with SAXS for a potential application as phase change material

Hydrogenated nano-crystalline silicon suboxide (nc-SiOx:H; x 

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Bibliographische Detailangaben
Veröffentlicht in:Surface & coatings technology 2019-09, Vol.374, p.164-170
Hauptverfasser: Bam, Begüm Çınar, Rüzgar, Kemal, Bacıoğlu, Akın, İde, Semra
Format: Artikel
Sprache:eng
Schlagworte:
Amorphous materials
Amorphous silicon
Atomic oxygen
Crystal structure
Crystallinity
Crystallization
Dependence
Dilution
Hydrogen
Hydrogen dilution
Hydrogen storage
Hydrogenated nano-crystalline silicon suboxide
Hydrogenation
Morphology
Nano-crystalline silicon
Nano-structured thin films
Organic chemistry
PECVD
Phase change materials
Plasma enhanced chemical vapor deposition
Raman spectra
SAXS
Silicon
Small angle X ray scattering
Solid phases
Structural analysis
Thin films
Two phase materials
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Zusammenfassung:Hydrogenated nano-crystalline silicon suboxide (nc-SiOx:H; x 
ISSN:0257-8972
1879-3347
DOI:10.1016/j.surfcoat.2019.05.083