Reduction of the uncertainty of the PTB vacuum pressure scate by a new large area non-rotating piston gauge

This paper describes the metrological characterization of a new large area piston gauge (FRS5, Furness Rosenberg Standard) installed at the vacuum metrology laboratory of the Physikalisch-Technische Bundesanstalt (PTB). The operational procedure and the uncertainty budget for pressures between 30 Pa...

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Veröffentlicht in:Metrologia 2009-10, Vol.46 (5), p.389
Hauptverfasser: Bock, Th, Ahrendt, H, Jousten, K
Format: Artikel
Sprache:eng
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Zusammenfassung:This paper describes the metrological characterization of a new large area piston gauge (FRS5, Furness Rosenberg Standard) installed at the vacuum metrology laboratory of the Physikalisch-Technische Bundesanstalt (PTB). The operational procedure and the uncertainty budget for pressures between 30 Pa and 11 kPa are given. Comparisons between the FRS5 and a mercury manometer, a rotary piston gauge and a force-balanced piston gauge are described. We show that the reproducibility of the calibration values of capacitance diaphragm gauges is enhanced by a factor of 6 compared with a static expansion primary standard (SE2). Improvements of the SE2 performance by reducing the number of expansions and smaller uncertainties of expansion ratios are discussed. [PUBLICATION ABSTRACT]
ISSN:0026-1394
1681-7575