P‐4.3: Reflective Color filters based on subwavelength diffraction gratings

This report discusses a potential reflected color filter for colorful display device. In this design, diffraction gratings could be color filter, reflect specific wavelengths to present blue, green, and red, even cyan and yellow. A 120nm silicon layer lays on a quartz substrate, and the silicon layer was patterned to generate a two‐dimensional circular pillars with different geometric parameters from 180nm pitch to 350nm Meanwhile, it has good tolerance to pillars shape and lattice parameters which are friendly news for volume production. Last but not least, these structures are independence of the polarization and insensitive angular of the incident light of 30°. These RGBCY five primary colors will extend the color gamma to 143% of NTSC. Designed structures can be volume fabricated by nano‐imprint lithography and etching processes.