High-quality spray-deposited fluorine-doped tin oxide: effect of film thickness on structural, morphological, electrical, and optical properties

High-quality fluorine-doped tin oxide (FTO) thin films were deposited using a low-cost homemade spray pyrolysis apparatus and the effect of film thickness on structural, morphological, electrical, and optical properties were investigated. As the thickness increases, the carrier concentration remains...

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Veröffentlicht in:Applied physics. A, Materials science & processing Materials science & processing, 2019-10, Vol.125 (10), p.1-8, Article 689
Hauptverfasser: Asl, Hassan Zare, Rozati, Seyed Mohammad
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Sprache:eng
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Zusammenfassung:High-quality fluorine-doped tin oxide (FTO) thin films were deposited using a low-cost homemade spray pyrolysis apparatus and the effect of film thickness on structural, morphological, electrical, and optical properties were investigated. As the thickness increases, the carrier concentration remains almost unchanged (~ 2.6 × 10 20  cm −3 ). However, as a result of grain size increase, mobility enhanced considerably (from 19.1 to 40.1 cm 2  V −1  s −1 ), which can be a convincing explanation for resistivity reduction (from 12.0 × 10 –4  Ω cm to 6.00 × 10 –4  Ω cm). As expected, the FTO thin films were highly transparent in the visible region and naturally decreased by increasing the thickness. The band-gap value of the spray-deposited FTO thin films was estimated, with results showing a gradual reduction with increasing thickness. The figure of merit was calculated for the prepared FTO thin film and an outstanding value of 9.77 × 10 –3  Ω −1 corresponding to an average transmittance of 78.60 (400–900 nm) and sheet resistance of 9.21 Ω/sq was achieved.
ISSN:0947-8396
1432-0630
DOI:10.1007/s00339-019-2943-8