Peculiarities of the Structure and Properties of Thin PZT Films with Strongly Nonuniform Depth–Composition Profiles
Two-layer thin films of lead zirconate titanate (PZT) with lead content in the layers differing by 20% were deposited by RF magnetron sputtering at variable working gas pressure in the system. The phase states, compositions, and dielectric properties of two-layer films obtained with different orders...
Gespeichert in:
Veröffentlicht in: | Technical physics letters 2019-08, Vol.45 (8), p.839-842 |
---|---|
Hauptverfasser: | , , , , , , |
Format: | Artikel |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Schreiben Sie den ersten Kommentar!