Peculiarities of the Structure and Properties of Thin PZT Films with Strongly Nonuniform Depth–Composition Profiles

Two-layer thin films of lead zirconate titanate (PZT) with lead content in the layers differing by 20% were deposited by RF magnetron sputtering at variable working gas pressure in the system. The phase states, compositions, and dielectric properties of two-layer films obtained with different orders...

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Veröffentlicht in:Technical physics letters 2019-08, Vol.45 (8), p.839-842
Hauptverfasser: Dolgintsev, D. M., Staritsyn, M. V., Pronin, V. P., Kaptelov, E. Yu, Senkevich, S. V., Pronin, I. P., Nemov, S. A.
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Sprache:eng
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