Peculiarities of the Structure and Properties of Thin PZT Films with Strongly Nonuniform Depth–Composition Profiles

Peculiarities of the Structure and Properties of Thin PZT Films with Strongly Nonuniform Depth–Composition Profiles

Two-layer thin films of lead zirconate titanate (PZT) with lead content in the layers differing by 20% were deposited by RF magnetron sputtering at variable working gas pressure in the system. The phase states, compositions, and dielectric properties of two-layer films obtained with different orders...

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Veröffentlicht in:Technical physics letters 2019-08, Vol.45 (8), p.839-842
Hauptverfasser: Dolgintsev, D. M., Staritsyn, M. V., Pronin, V. P., Kaptelov, E. Yu, Senkevich, S. V., Pronin, I. P., Nemov, S. A.
Format: Artikel
Sprache:eng
Schlagworte:
Classical and Continuum Physics
Composition
Crystallization
Deposition
Dielectric properties
Gas pressure
Lead zirconate titanates
Magnetron sputtering
Perovskites
Physics
Physics and Astronomy
Thin films
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Beschreibung
Zusammenfassung:Two-layer thin films of lead zirconate titanate (PZT) with lead content in the layers differing by 20% were deposited by RF magnetron sputtering at variable working gas pressure in the system. The phase states, compositions, and dielectric properties of two-layer films obtained with different orders of layer deposition were compared. It is established that the order of deposition significantly influences the conditions of crystallization of the perovskite phase and unipolar properties of PZT films.
ISSN:1063-7850
1090-6533
DOI:10.1134/S1063785019080200