The study of converse piezoelectric-effect of ZnO thin film

The study of converse piezoelectric-effect of ZnO thin film

Polycrystalline ZnO thin film has been deposited on Si cantilever beam substrate by pulsed laser deposition (PLD) technique. The high-resolution x-ray diffraction (HR-XRD) analysis suggests the formation of wurtzite structure along c-axis. The atomic force microscopy (AFM) measurement reveals the gr...

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Hauptverfasser: Guchhait, Suman, Ahmad, Aquil, Aireddy, H., Das, A. K.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Atomic force microscopy
Cantilever beams
Laser beams
Microscopes
Photovoltaic cells
Piezoelectricity
Pulsed laser deposition
Pulsed lasers
Silicon substrates
Thin films
Wurtzite
Zinc oxide
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Zusammenfassung:Polycrystalline ZnO thin film has been deposited on Si cantilever beam substrate by pulsed laser deposition (PLD) technique. The high-resolution x-ray diffraction (HR-XRD) analysis suggests the formation of wurtzite structure along c-axis. The atomic force microscopy (AFM) measurement reveals the growth of a good crystalline film. We have studied the converse piezoelectric-effect of the as-deposited film from +3V to -3V dc voltage. The curve shows a butterfly type loop, which is in good agreement with available literatures.
ISSN:0094-243X
1551-7616
DOI:10.1063/1.5122438