Reduction of adhesion and friction of silicon oxide surface in the presence of n-propanol vapor in the gas phase

The equilibrium adsorption of gas phase alcohol molecules has been proposed as a new means of in-use anti-stiction and lubrication for MEMS devices. Adhesion and friction of silicon oxide surfaces as a function of n-propanol vapor pressure in the ambient gas were invesitigated using atomic force mic...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Tribology letters 2005-05, Vol.19 (1), p.17-21
Hauptverfasser:	Strawhecker, K., Asay, D. B., McKinney, J., Kim, S. H.
Format:	Artikel
Sprache:	eng
Schlagworte:	Adhesion Atomic force microscopy Friction Lubrication Microelectromechanical systems Product design Silicon oxides Stiction Thickness Tribology Vapor phases Vapor pressure
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!