Reduction of adhesion and friction of silicon oxide surface in the presence of n-propanol vapor in the gas phase

The equilibrium adsorption of gas phase alcohol molecules has been proposed as a new means of in-use anti-stiction and lubrication for MEMS devices. Adhesion and friction of silicon oxide surfaces as a function of n-propanol vapor pressure in the ambient gas were invesitigated using atomic force microscopy. As the vapor pressure increases, the adsorbed n-propanol layer thickness increases. The adhesion and friction significantly decrease with very little addition of n-propanol vapor.