Experimental and Theoretical Study of the Triple-Crystal High-Resolution X-Ray Diffraction Scheme in Reciprocal Space Mapping Technique

The triple-crystal high-resolution X-ray diffraction scheme has been experimentally and theoretically investigated using reciprocal space mapping. The procedure for calculating the spectral angular instrumental functions of diffractometer to take into account the influence of mirror, monochromator, analyzer, and slits on the intensity distribution near reciprocal lattice point is described. Good coincidence of calculated and experimental cross sections of reciprocal space maps (RSMs) is shown by an example of a perfect Si(110) single crystal.