Vibration reduction control of a voice coil motor (VCM)-driven actuator for SPM applications
This paper presents vibration reduction control of a voice coil motor (VCM)-driven actuator for SPM applications. We had developed a VCM nanoscanner. The scanner has flexure hinges structure. However, the VCM nanoscanner has some problems of thermal drift and small damping compared to the PZT driven...
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| Veröffentlicht in: | International journal of advanced manufacturing technology 2010-02, Vol.46 (9-12), p.923-930 |
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| container_issue | 9-12 |
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| container_title | International journal of advanced manufacturing technology |
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| creator | Jung, Jongkyu Youm, Woosub Lee, SungQ Park, Kyihwan |
| description | This paper presents vibration reduction control of a voice coil motor (VCM)-driven actuator for SPM applications. We had developed a VCM nanoscanner. The scanner has flexure hinges structure. However, the VCM nanoscanner has some problems of thermal drift and small damping compared to the PZT driven nanoscanner. Especially, the small damping coefficient of the VCM nanoscanner causes mechanical vibration when the control input signal is near to the resonance frequencies of the scanner. Additionally, disturbance to the VCM scanner and electronic noise in the sensor also causes the mechanical vibration when they are near to the resonant frequencies. The mechanical vibration reduces the servo bandwidth as well as the accuracy, which deteriorates the AFM image of the samples. We design input shaping prefilter to reduce the signal applied to the VCM nanoscanner and electronic noise in the sensor whose frequency is close to the resonant frequency of the VCM nanoscanner. We measure the time and frequency response of the VCM scanner without using the prefilter and with using the prefilter. Finally, the topology images of a bare wafer are measured and compared using the AFM. |
| doi_str_mv | 10.1007/s00170-009-2042-7 |
| format | Article |
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We had developed a VCM nanoscanner. The scanner has flexure hinges structure. However, the VCM nanoscanner has some problems of thermal drift and small damping compared to the PZT driven nanoscanner. Especially, the small damping coefficient of the VCM nanoscanner causes mechanical vibration when the control input signal is near to the resonance frequencies of the scanner. Additionally, disturbance to the VCM scanner and electronic noise in the sensor also causes the mechanical vibration when they are near to the resonant frequencies. The mechanical vibration reduces the servo bandwidth as well as the accuracy, which deteriorates the AFM image of the samples. We design input shaping prefilter to reduce the signal applied to the VCM nanoscanner and electronic noise in the sensor whose frequency is close to the resonant frequency of the VCM nanoscanner. We measure the time and frequency response of the VCM scanner without using the prefilter and with using the prefilter. Finally, the topology images of a bare wafer are measured and compared using the AFM.</description><identifier>ISSN: 0268-3768</identifier><identifier>EISSN: 1433-3015</identifier><identifier>DOI: 10.1007/s00170-009-2042-7</identifier><language>eng</language><publisher>London: Springer-Verlag</publisher><subject>Actuators ; CAE) and Design ; Coils ; Computer-Aided Engineering (CAD ; Damping ; Engineering ; Flexing ; Frequency response ; Industrial and Production Engineering ; Input shaping ; Mechanical Engineering ; Media Management ; Resonant frequencies ; Scanners ; Special Issue - Original Article ; Topology ; Vibration control ; Voice control</subject><ispartof>International journal of advanced manufacturing technology, 2010-02, Vol.46 (9-12), p.923-930</ispartof><rights>Springer-Verlag London Limited 2009</rights><rights>The International Journal of Advanced Manufacturing Technology is a copyright of Springer, (2009). 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We had developed a VCM nanoscanner. The scanner has flexure hinges structure. However, the VCM nanoscanner has some problems of thermal drift and small damping compared to the PZT driven nanoscanner. Especially, the small damping coefficient of the VCM nanoscanner causes mechanical vibration when the control input signal is near to the resonance frequencies of the scanner. Additionally, disturbance to the VCM scanner and electronic noise in the sensor also causes the mechanical vibration when they are near to the resonant frequencies. The mechanical vibration reduces the servo bandwidth as well as the accuracy, which deteriorates the AFM image of the samples. We design input shaping prefilter to reduce the signal applied to the VCM nanoscanner and electronic noise in the sensor whose frequency is close to the resonant frequency of the VCM nanoscanner. We measure the time and frequency response of the VCM scanner without using the prefilter and with using the prefilter. Finally, the topology images of a bare wafer are measured and compared using the AFM.</description><subject>Actuators</subject><subject>CAE) and Design</subject><subject>Coils</subject><subject>Computer-Aided Engineering (CAD</subject><subject>Damping</subject><subject>Engineering</subject><subject>Flexing</subject><subject>Frequency response</subject><subject>Industrial and Production Engineering</subject><subject>Input shaping</subject><subject>Mechanical Engineering</subject><subject>Media Management</subject><subject>Resonant frequencies</subject><subject>Scanners</subject><subject>Special Issue - Original Article</subject><subject>Topology</subject><subject>Vibration control</subject><subject>Voice control</subject><issn>0268-3768</issn><issn>1433-3015</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2010</creationdate><recordtype>article</recordtype><sourceid>AFKRA</sourceid><sourceid>BENPR</sourceid><sourceid>CCPQU</sourceid><sourceid>DWQXO</sourceid><recordid>eNp1kM1LAzEQxYMoWKt_gLeAFz1EJx-bbI9S_IIWBbUnIWSnWdmy3azJbsH_3m0rePIwzPB47w38CDnncM0BzE0C4AYYwIQJUIKZAzLiSkomgWeHZARC50wanR-Tk5RWg1tznY_Ix6Iqouuq0NDolz3uLgxNF0NNQ0kd3YQK_SBVNV2HLkR6uZjOr9gyVhvfUIdd77ZqOczry5y6tq0r3DWmU3JUujr5s989Ju_3d2_TRzZ7fnia3s4YSq47hmDMUmToDWrMCyydM1yjUtKITKoCuVLcIQfjATNhsknpIZNeTYwShSvkmFzse9sYvnqfOrsKfWyGl1YILRTPc80HF9-7MIaUoi9tG6u1i9-Wg91CtHuIdoBotxCtGTJin0mDt_n08a_5_9APY1xz1w</recordid><startdate>20100201</startdate><enddate>20100201</enddate><creator>Jung, Jongkyu</creator><creator>Youm, Woosub</creator><creator>Lee, SungQ</creator><creator>Park, Kyihwan</creator><general>Springer-Verlag</general><general>Springer Nature B.V</general><scope>AAYXX</scope><scope>CITATION</scope><scope>8FE</scope><scope>8FG</scope><scope>ABJCF</scope><scope>AFKRA</scope><scope>BENPR</scope><scope>BGLVJ</scope><scope>CCPQU</scope><scope>DWQXO</scope><scope>HCIFZ</scope><scope>L6V</scope><scope>M7S</scope><scope>PQEST</scope><scope>PQQKQ</scope><scope>PQUKI</scope><scope>PRINS</scope><scope>PTHSS</scope></search><sort><creationdate>20100201</creationdate><title>Vibration reduction control of a voice coil motor (VCM)-driven actuator for SPM applications</title><author>Jung, Jongkyu ; 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We had developed a VCM nanoscanner. The scanner has flexure hinges structure. However, the VCM nanoscanner has some problems of thermal drift and small damping compared to the PZT driven nanoscanner. Especially, the small damping coefficient of the VCM nanoscanner causes mechanical vibration when the control input signal is near to the resonance frequencies of the scanner. Additionally, disturbance to the VCM scanner and electronic noise in the sensor also causes the mechanical vibration when they are near to the resonant frequencies. The mechanical vibration reduces the servo bandwidth as well as the accuracy, which deteriorates the AFM image of the samples. We design input shaping prefilter to reduce the signal applied to the VCM nanoscanner and electronic noise in the sensor whose frequency is close to the resonant frequency of the VCM nanoscanner. We measure the time and frequency response of the VCM scanner without using the prefilter and with using the prefilter. 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| ispartof | International journal of advanced manufacturing technology, 2010-02, Vol.46 (9-12), p.923-930 |
| issn | 0268-3768 1433-3015 |
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| subjects | Actuators CAE) and Design Coils Computer-Aided Engineering (CAD Damping Engineering Flexing Frequency response Industrial and Production Engineering Input shaping Mechanical Engineering Media Management Resonant frequencies Scanners Special Issue - Original Article Topology Vibration control Voice control |
| title | Vibration reduction control of a voice coil motor (VCM)-driven actuator for SPM applications |
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