Ultra-Fast and High-Precision Crystal Orientation Measurements on 4H-SiС

Ultra-Fast and High-Precision Crystal Orientation Measurements on 4H-SiС

For a fast and precise crystal orientation of 4H-SiC, the so-called Omega-scan is presented. With this method the orientation can be determined within only 5 s. This paper presents a detailed study of different influences on the precision and repeatability of this method on 4H-SiC.

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Veröffentlicht in:Materials science forum 2019-07, Vol.963, p.332-335
Hauptverfasser: Weißbach, Torsten, Schüler, Nadine, Berger, Hans, Dornich, Kay, Bradaczek, Hans Arthur
Format: Artikel
Sprache:eng
Schlagworte:
Crystal structure
Orientation
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Beschreibung
Zusammenfassung:For a fast and precise crystal orientation of 4H-SiC, the so-called Omega-scan is presented. With this method the orientation can be determined within only 5 s. This paper presents a detailed study of different influences on the precision and repeatability of this method on 4H-SiC.
ISSN:0255-5476
1662-9752
1662-9752
DOI:10.4028/www.scientific.net/MSF.963.332