Sol-gel formation of ITO thin film from a sol including ITO powder

Recently, low temperature synthesis of ITO thin film of low resistivity is desired in the field of LCD (Liquid Crystalline Display) production. This paper describes the results of experiment to produce ITO thin film from a sol containing crystalline ITO particles and alkoxides of In and Sn. Crystallization temperature of ITO thin film obtained from the sol mixed with ITO powder was lower than that of ITO from the sol without ITO powder. Furthermore, the resistivity of the former ITO thin film was lower than that of the latter. It was assumed that these results were attributed to the promotion effect of ITO crystalline particles to crystalize the amorphous ITO gel at lower temperature. This low temperature crystallization effect plays an important role in enhancing the crystallinity and electric conductivity of ITO thin film from sol-gel process.