Fabrication of Micro-Optic Elements by the Sol-Gel Method

Fabrication of Micro-Optic Elements by the Sol-Gel Method

Micro-lens arrays composed of organic-inorganic materials were molded on glass substrates by the sol-gel method. Each lens had the same focal length and accurate pitch. There was no change in appearance or focal length after heat treatment at 350°C. The arrays had a refractive index of 1.53 (@1550 n...

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Veröffentlicht in:Journal of sol-gel science and technology 2000-12, Vol.19 (1-3), p.267-269
Hauptverfasser: Shinmou, Katsuhide, Nakama, Kenichi, Koyama, Tadashi
Format: Artikel
Sprache:eng
Schlagworte:
Acid resistance
Arrays
Glass substrates
Heat treatment
Inorganic materials
Refractivity
Sol-gel processes
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Zusammenfassung:Micro-lens arrays composed of organic-inorganic materials were molded on glass substrates by the sol-gel method. Each lens had the same focal length and accurate pitch. There was no change in appearance or focal length after heat treatment at 350°C. The arrays had a refractive index of 1.53 (@1550 nm) and a transmittance of 98%/mm (@1550 nm). The film material did not change in appearance during evaluation for acid resistance.
ISSN:0928-0707
1573-4846
DOI:10.1023/A:1008756826711