Improvement of electrical properties of sol–gel derived ZnO:Ga films by infrared heating method

In this study, we investigated the influences of gallium concentration and a rapid thermal annealing process on the electrical and optical properties of ZnO:Ga (GZO) films prepared by sol–gel method. Experimental data indicated that the preferential growth directions of ZnO crystallites were the (002) and (103) axes. This phenomenon implied that the nucleation and growth behaviors of ZnO crystallites were changed by the infrared heating procedure and monoethanolamine. Furthermore, since the deposited sol films were heated simultaneously, evenly, and rapidly, dopant material Ga got the opportunity to replace Zn instead of forming oxides embedded in grain boundary areas. Thus, carrier concentration of the GZO films can be considerably enhanced while the mobility of the GZO films was not apparently affected in our experiments. It was also found that the carrier concentration was not sensitive to Ga/Zn ratio even though higher Ga concentration led to lower mobility. The best sample with a resistivity of 2.20 × 10 −3 Ω cm and a transmittance of over 80% in visible region was achieved with 1.0 at.% Ga.