Fabrication of surface: relief gratings and their laser induced damage resistance properties

This work demonstrates a promising method for fabricating ZrO 2 surface–relief gratings by photosensitive sol–gel method combining with two-beam laser interference. UV-photosensitive ZrO 2 resist with high resolution are prepared by using metal–chelate complexes as precursors. Two-beam laser interference lithography is carried out by a Kr ion laser with a wavelength of 350.7 nm and ZrO 2 gratings with the minimum line-width of 150 nm are obtained. Laser induced damage resistance properties of ZrO 2 gratings are investigated by a Q-switched solid state laser with the wavelength of 527 nm and the pulse width of 8.65 ns as the incident source. The results show that the LIDT of ZrO 2 gratings on glass substrate heated at 600 °C is about 4.59 ± 0.06 J/cm 2 .