Reduction of Boron Trichloride in Atmospheric-Pressure Argon–Hydrogen Radiofrequency Induction Plasma

The main operating modes of a radiofrequency induction plasma torch with a vortex stabilization of the atmospheric-pressure gas discharge at have been studied in an argon-hydrogen mixture in the range of Ar/H 2 = 12–4. The dependences of the electron temperature T e and number density n e on the Ar/H 2 ratio have been experimentally studied. It has been found that the electron temperature and concentration in pure argon plasma are 0.88 eV and 7.6 × 10 14 cm −3 , respectively. When the Ar/H 2 ratio decreases, the electron temperature decreases to 0.42 eV, and the electron number density is 8 × 10 12 cm −3 . The calorimetric method used to estimate the gas temperature T g , has given a value of 2500 K. The process of BCl 3 reduction with hydrogen has been studied at the implemented operating modes of the induction plasma torch. The main products of the reduction of boron trichloride are a polycrystalline boron powder and dichloroborane. The morphology of boron and its phase composition and impurities have been studied. The average particle size of the boron powder is 200 nm.