Mo/Si Multilayer Mirrors with B4C and Be Barrier Layers
— Conventional Mo/Si mirrors and mirrors with B 4 C and Be barrier layers, designed for reflection at wavelengths around 13.5 nm, are fabricated using magnetron sputtering and studied. Their reflectance is measured at different grazing angles and at different wavelengths. Four-component multilayer m...
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| Veröffentlicht in: | Surface investigation, x-ray, synchrotron and neutron techniques x-ray, synchrotron and neutron techniques, 2019-03, Vol.13 (2), p.169-172 |
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| container_title | Surface investigation, x-ray, synchrotron and neutron techniques |
| container_volume | 13 |
| creator | Zuyev, S. Yu Pariev, D. E. Pleshkov, R. S. Polkovnikov, V. N. Salashchenko, N. N. Svechnikov, M. V. Sertsu, M. G. Sokolov, A. Chkhalo, N. I. Schäfers, F. |
| description | —
Conventional Mo/Si mirrors and mirrors with B
4
C and Be barrier layers, designed for reflection at wavelengths around 13.5 nm, are fabricated using magnetron sputtering and studied. Their reflectance is measured at different grazing angles and at different wavelengths. Four-component multilayer mirrors of the Mo/Be/Si/B
4
C type are shown to surpass, in terms of the reflection coefficient, their Mo/Si and Mo/Si/B
4
C counterparts by 2 and 1%, respectively, at wavelengths of incident radiation of 12.4, 12.7, 13.0, and 13.5 nm. |
| doi_str_mv | 10.1134/S1027451019020216 |
| format | Article |
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Conventional Mo/Si mirrors and mirrors with B
4
C and Be barrier layers, designed for reflection at wavelengths around 13.5 nm, are fabricated using magnetron sputtering and studied. Their reflectance is measured at different grazing angles and at different wavelengths. Four-component multilayer mirrors of the Mo/Be/Si/B
4
C type are shown to surpass, in terms of the reflection coefficient, their Mo/Si and Mo/Si/B
4
C counterparts by 2 and 1%, respectively, at wavelengths of incident radiation of 12.4, 12.7, 13.0, and 13.5 nm.</description><identifier>ISSN: 1027-4510</identifier><identifier>EISSN: 1819-7094</identifier><identifier>DOI: 10.1134/S1027451019020216</identifier><language>eng</language><publisher>Moscow: Pleiades Publishing</publisher><subject>Angle of reflection ; Barrier layers ; Boron carbide ; Chemistry and Materials Science ; Incident radiation ; Magnetron sputtering ; Materials Science ; Multilayers ; Reflectance ; Surfaces and Interfaces ; Thin Films ; Wave reflection ; Wavelengths</subject><ispartof>Surface investigation, x-ray, synchrotron and neutron techniques, 2019-03, Vol.13 (2), p.169-172</ispartof><rights>Pleiades Publishing, Ltd. 2019</rights><rights>Copyright Springer Nature B.V. 2019</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c316t-81e6807282f64f4d2247a3dac181078bd73fd052a83a95959efc5ce5d7c07a7e3</citedby><cites>FETCH-LOGICAL-c316t-81e6807282f64f4d2247a3dac181078bd73fd052a83a95959efc5ce5d7c07a7e3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://link.springer.com/content/pdf/10.1134/S1027451019020216$$EPDF$$P50$$Gspringer$$H</linktopdf><linktohtml>$$Uhttps://link.springer.com/10.1134/S1027451019020216$$EHTML$$P50$$Gspringer$$H</linktohtml><link.rule.ids>314,780,784,27924,27925,41488,42557,51319</link.rule.ids></links><search><creatorcontrib>Zuyev, S. Yu</creatorcontrib><creatorcontrib>Pariev, D. E.</creatorcontrib><creatorcontrib>Pleshkov, R. S.</creatorcontrib><creatorcontrib>Polkovnikov, V. N.</creatorcontrib><creatorcontrib>Salashchenko, N. N.</creatorcontrib><creatorcontrib>Svechnikov, M. V.</creatorcontrib><creatorcontrib>Sertsu, M. G.</creatorcontrib><creatorcontrib>Sokolov, A.</creatorcontrib><creatorcontrib>Chkhalo, N. I.</creatorcontrib><creatorcontrib>Schäfers, F.</creatorcontrib><title>Mo/Si Multilayer Mirrors with B4C and Be Barrier Layers</title><title>Surface investigation, x-ray, synchrotron and neutron techniques</title><addtitle>J. Synch. Investig</addtitle><description>—
Conventional Mo/Si mirrors and mirrors with B
4
C and Be barrier layers, designed for reflection at wavelengths around 13.5 nm, are fabricated using magnetron sputtering and studied. Their reflectance is measured at different grazing angles and at different wavelengths. Four-component multilayer mirrors of the Mo/Be/Si/B
4
C type are shown to surpass, in terms of the reflection coefficient, their Mo/Si and Mo/Si/B
4
C counterparts by 2 and 1%, respectively, at wavelengths of incident radiation of 12.4, 12.7, 13.0, and 13.5 nm.</description><subject>Angle of reflection</subject><subject>Barrier layers</subject><subject>Boron carbide</subject><subject>Chemistry and Materials Science</subject><subject>Incident radiation</subject><subject>Magnetron sputtering</subject><subject>Materials Science</subject><subject>Multilayers</subject><subject>Reflectance</subject><subject>Surfaces and Interfaces</subject><subject>Thin Films</subject><subject>Wave reflection</subject><subject>Wavelengths</subject><issn>1027-4510</issn><issn>1819-7094</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2019</creationdate><recordtype>article</recordtype><recordid>eNp1kE9LAzEQxYMoWKsfwFvA89qZSbLJHm3xH3TxUD0vcTerW2q3TrZIv70pFTyIzGEG3u_NDE-IS4RrRKUnCwSy2iBgAQSE-ZEYocMis1Do4zQnOdvrp-IsxiWAscrkI2HLfrLoZLldDd3K7wLLsmPuOcqvbniXUz2Tft3IaZBTz9wlfb6n4rk4af0qhoufPhYvd7fPs4ds_nT_OLuZZ7XCfMgchtyBJUdtrlvdEGnrVePr9BtY99pY1TZgyDvlC5MqtLWpg2lsDdbboMbi6rB3w_3nNsShWvZbXqeTFREVZMgpmyg8UDX3MXJoqw13H553FUK1z6f6k0_y0METE7t-C_y7-X_TNyJbY-0</recordid><startdate>20190301</startdate><enddate>20190301</enddate><creator>Zuyev, S. Yu</creator><creator>Pariev, D. E.</creator><creator>Pleshkov, R. S.</creator><creator>Polkovnikov, V. N.</creator><creator>Salashchenko, N. N.</creator><creator>Svechnikov, M. V.</creator><creator>Sertsu, M. G.</creator><creator>Sokolov, A.</creator><creator>Chkhalo, N. I.</creator><creator>Schäfers, F.</creator><general>Pleiades Publishing</general><general>Springer Nature B.V</general><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>20190301</creationdate><title>Mo/Si Multilayer Mirrors with B4C and Be Barrier Layers</title><author>Zuyev, S. Yu ; Pariev, D. E. ; Pleshkov, R. S. ; Polkovnikov, V. N. ; Salashchenko, N. N. ; Svechnikov, M. V. ; Sertsu, M. G. ; Sokolov, A. ; Chkhalo, N. I. ; Schäfers, F.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c316t-81e6807282f64f4d2247a3dac181078bd73fd052a83a95959efc5ce5d7c07a7e3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2019</creationdate><topic>Angle of reflection</topic><topic>Barrier layers</topic><topic>Boron carbide</topic><topic>Chemistry and Materials Science</topic><topic>Incident radiation</topic><topic>Magnetron sputtering</topic><topic>Materials Science</topic><topic>Multilayers</topic><topic>Reflectance</topic><topic>Surfaces and Interfaces</topic><topic>Thin Films</topic><topic>Wave reflection</topic><topic>Wavelengths</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Zuyev, S. Yu</creatorcontrib><creatorcontrib>Pariev, D. E.</creatorcontrib><creatorcontrib>Pleshkov, R. S.</creatorcontrib><creatorcontrib>Polkovnikov, V. N.</creatorcontrib><creatorcontrib>Salashchenko, N. N.</creatorcontrib><creatorcontrib>Svechnikov, M. V.</creatorcontrib><creatorcontrib>Sertsu, M. G.</creatorcontrib><creatorcontrib>Sokolov, A.</creatorcontrib><creatorcontrib>Chkhalo, N. I.</creatorcontrib><creatorcontrib>Schäfers, F.</creatorcontrib><collection>CrossRef</collection><jtitle>Surface investigation, x-ray, synchrotron and neutron techniques</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Zuyev, S. Yu</au><au>Pariev, D. E.</au><au>Pleshkov, R. S.</au><au>Polkovnikov, V. N.</au><au>Salashchenko, N. N.</au><au>Svechnikov, M. V.</au><au>Sertsu, M. G.</au><au>Sokolov, A.</au><au>Chkhalo, N. I.</au><au>Schäfers, F.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Mo/Si Multilayer Mirrors with B4C and Be Barrier Layers</atitle><jtitle>Surface investigation, x-ray, synchrotron and neutron techniques</jtitle><stitle>J. Synch. Investig</stitle><date>2019-03-01</date><risdate>2019</risdate><volume>13</volume><issue>2</issue><spage>169</spage><epage>172</epage><pages>169-172</pages><issn>1027-4510</issn><eissn>1819-7094</eissn><abstract>—
Conventional Mo/Si mirrors and mirrors with B
4
C and Be barrier layers, designed for reflection at wavelengths around 13.5 nm, are fabricated using magnetron sputtering and studied. Their reflectance is measured at different grazing angles and at different wavelengths. Four-component multilayer mirrors of the Mo/Be/Si/B
4
C type are shown to surpass, in terms of the reflection coefficient, their Mo/Si and Mo/Si/B
4
C counterparts by 2 and 1%, respectively, at wavelengths of incident radiation of 12.4, 12.7, 13.0, and 13.5 nm.</abstract><cop>Moscow</cop><pub>Pleiades Publishing</pub><doi>10.1134/S1027451019020216</doi><tpages>4</tpages></addata></record> |
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| issn | 1027-4510 1819-7094 |
| language | eng |
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| source | SpringerNature Journals |
| subjects | Angle of reflection Barrier layers Boron carbide Chemistry and Materials Science Incident radiation Magnetron sputtering Materials Science Multilayers Reflectance Surfaces and Interfaces Thin Films Wave reflection Wavelengths |
| title | Mo/Si Multilayer Mirrors with B4C and Be Barrier Layers |
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