Mo/Si Multilayer Mirrors with B4C and Be Barrier Layers

— Conventional Mo/Si mirrors and mirrors with B 4 C and Be barrier layers, designed for reflection at wavelengths around 13.5 nm, are fabricated using magnetron sputtering and studied. Their reflectance is measured at different grazing angles and at different wavelengths. Four-component multilayer m...

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Veröffentlicht in:	Surface investigation, x-ray, synchrotron and neutron techniques x-ray, synchrotron and neutron techniques, 2019-03, Vol.13 (2), p.169-172
Hauptverfasser:	Zuyev, S. Yu, Pariev, D. E., Pleshkov, R. S., Polkovnikov, V. N., Salashchenko, N. N., Svechnikov, M. V., Sertsu, M. G., Sokolov, A., Chkhalo, N. I., Schäfers, F.
Format:	Artikel
Sprache:	eng
Schlagworte:	Angle of reflection Barrier layers Boron carbide Chemistry and Materials Science Incident radiation Magnetron sputtering Materials Science Multilayers Reflectance Surfaces and Interfaces Thin Films Wave reflection Wavelengths
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Zusammenfassung:	— Conventional Mo/Si mirrors and mirrors with B 4 C and Be barrier layers, designed for reflection at wavelengths around 13.5 nm, are fabricated using magnetron sputtering and studied. Their reflectance is measured at different grazing angles and at different wavelengths. Four-component multilayer mirrors of the Mo/Be/Si/B 4 C type are shown to surpass, in terms of the reflection coefficient, their Mo/Si and Mo/Si/B 4 C counterparts by 2 and 1%, respectively, at wavelengths of incident radiation of 12.4, 12.7, 13.0, and 13.5 nm.
ISSN:	1027-4510 1819-7094
DOI:	10.1134/S1027451019020216