Frequency-tunable high-Q superconducting resonators via wireless control of nonlinear kinetic inductance

Frequency-tunable microwave resonators are in great demand especially in hybrid systems where precise frequency alignment of resonances is required. Here, we present frequency-tunable high-Q superconducting resonators fabricated from thin niobium nitride and niobium titanium nitride films. The resonant frequency is tuned by applying a magnetic field perpendicular to the hole structures in the resonator's inductor wire, whose kinetic inductance is modified by wirelessly induced DC supercurrents. A continuous in situ frequency tuning of over 300 MHz is achieved for a 10 GHz resonator with a moderate magnetic field of 1.2 mT. The planar resonator design and the noncontact tuning scheme greatly ease the fabrication complexity and can be widely applied in many hybrid systems for coupling microwave modes with other forms of excitations such as optical photons, phonons, magnons, and spins.