Atomic-Force Microscopy in the Study of the Tribological Characteristics of Thin Al−Si−N Coatings

Atomic-Force Microscopy in the Study of the Tribological Characteristics of Thin Al−Si−N Coatings

Results of the atomic-force microscopic determination of the surface microstructure and roughness, friction forces and coefficients of nanocrystalline AlSiN films in the initial state and after annealing are presented. A procedure is proposed to determine the friction coefficients by atomic-force mi...

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Veröffentlicht in:Surface investigation, x-ray, synchrotron and neutron techniques x-ray, synchrotron and neutron techniques, 2019, Vol.13 (1), p.36-40
Hauptverfasser: Kuznetsova, T. A., Zubar, T. I., Lapitskaya, V. A., Sudilovskaya, K. A., Chizhik, S. A., Uglov, V. V., Shimanskii, V. I., Kvasov, N. T.
Format: Artikel
Sprache:eng
Schlagworte:
Aluminum
Annealing
Atomic force microscopy
Chemistry and Materials Science
Coefficient of friction
Friction
Ice
Materials Science
Microscopes
Microscopy
Silicon
Surfaces and Interfaces
Thin Films
Tribology
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Beschreibung
Zusammenfassung:Results of the atomic-force microscopic determination of the surface microstructure and roughness, friction forces and coefficients of nanocrystalline AlSiN films in the initial state and after annealing are presented. A procedure is proposed to determine the friction coefficients by atomic-force microscopy with multi-pass scanning. The dependences of the friction coefficients on the number of passes are obtained. A significant effect of annealing on a decrease in the friction coefficients of AlSiN films is detected.
ISSN:1027-4510
1819-7094
DOI:10.1134/S1027451019010117