Two-Wave Laser Stereolithography for Fabrication of IR Sensors for Surface-Enhanced Spectroscopy

The results of applying two-photon femtosecond laser photopolymerization for fabrication of structures for sensitive IR sensors are reported. Two methods of sensor fabrication, a two-wave laser stereolithography and an electron-beam lithography, are compared. The possibility of applying the obtained...

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Veröffentlicht in:Optics and spectroscopy 2019, Vol.126 (1), p.54-58
Hauptverfasser: Vitukhnovsky, A. G., Zvagelsky, R. D., Kolymagin, D. A., Pisarenko, A. V., Chubich, D. A.
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Sprache:eng
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Zusammenfassung:The results of applying two-photon femtosecond laser photopolymerization for fabrication of structures for sensitive IR sensors are reported. Two methods of sensor fabrication, a two-wave laser stereolithography and an electron-beam lithography, are compared. The possibility of applying the obtained structures for investigation of the effect of surface-enhanced IR absorption (SEIRA) with a STED-compatible oligomer pentaerythritol tetraacrylate (PETTA) as an analytical layer is demonstrated.
ISSN:0030-400X
1562-6911
DOI:10.1134/S0030400X19010193