Two-Wave Laser Stereolithography for Fabrication of IR Sensors for Surface-Enhanced Spectroscopy
The results of applying two-photon femtosecond laser photopolymerization for fabrication of structures for sensitive IR sensors are reported. Two methods of sensor fabrication, a two-wave laser stereolithography and an electron-beam lithography, are compared. The possibility of applying the obtained...
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Veröffentlicht in: | Optics and spectroscopy 2019, Vol.126 (1), p.54-58 |
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Hauptverfasser: | , , , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | The results of applying two-photon femtosecond laser photopolymerization for fabrication of structures for sensitive IR sensors are reported. Two methods of sensor fabrication, a two-wave laser stereolithography and an electron-beam lithography, are compared. The possibility of applying the obtained structures for investigation of the effect of surface-enhanced IR absorption (SEIRA) with a STED-compatible oligomer pentaerythritol tetraacrylate (PETTA) as an analytical layer is demonstrated. |
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ISSN: | 0030-400X 1562-6911 |
DOI: | 10.1134/S0030400X19010193 |