Identification and Excitation Mechanisms of the Lines and Bands of Boron-Containing Components in the Optical Emission Spectra of Low-Temperature BF3/Ar Plasmas

B and B + emission lines and the identification of BF emission bands in the spectra of technological BF 3 /Ar plasmas are analyzed. The bands identified correspond to the electron-vibrational transitions b 3 Σ + (ν'') → a 3 Π(ν'), ν'' = 0–2, and lie in the range 310–340 nm. In the spectra, no emission lines belonging to other boron-containing compounds are observed.