NF3 synthesis using ClF3 as a mediator

[Display omitted] •This NF3 synthesis process uses NH3 and F2 as raw materials with a ClF3 mediator.•Earlier reported NF2Cl and NFCl2 syntheses are used for NF3 synthesis.•We synthesized NF3 by reacting NF2Cl and NFCl2 with F2, producing recyclable ClF3.•Yield improvement necessitates ClF3 recovery rate improvement.•Equilibrium characteristics of ClF + F2 = ClF3 are overcome with a two-step reaction. Synthesis of NF3 using NH4F/nHF and F2 with ClF3, NF2Cl, and NFCl2 intermediates was conducted by sequential reaction testing for more than 100 h. Results demonstrated that NF3 can be synthesized with yield of more than 90% - fluorine molecule base. The ClF3 produced as a by-product can be recycled for reaction with NH4F/nHF. Improving the yield necessitates ClF3 recovery rate improvement, but characteristics of using ClF + F2 = ClF3 as an equilibrium reaction can be overcome with a two-step reaction. NH4F/nHF can be recycled continuously by controlling the n value in NH4F/nHF through NH3 addition and HF extraction. Using ClF3 as a mediator and NH3 and F2 as raw materials, NF3 synthesis was achieved at atmospheric pressure.