Improvement of Lateral Resolution of 3D-Relief Interferometric Measurement by Deconvolution

The way of the lateral resolution improvement for 3D nanorelief measurement is proposed. Algorithm for digital processing of measurement data based on deconvolution operation using Wiener filtration is presented. Results of theoretical researches, numerical and optical experiments are given.

Bibliographische Detailangaben

Veröffentlicht in:	Applied mechanics and materials 2017-09, Vol.870, p.120-125
Hauptverfasser:	Sysoev, Evgeny V., Vykhristyuk, Ignat A., Kulikov, Rodion V., Shirokov, Vasiliy V.
Format:	Artikel
Sprache:	eng
Schlagworte:	Algorithms Batch processing Deconvolution
Online-Zugang:	Volltext
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