Improvement of Lateral Resolution of 3D-Relief Interferometric Measurement by Deconvolution

Improvement of Lateral Resolution of 3D-Relief Interferometric Measurement by Deconvolution

The way of the lateral resolution improvement for 3D nanorelief measurement is proposed. Algorithm for digital processing of measurement data based on deconvolution operation using Wiener filtration is presented. Results of theoretical researches, numerical and optical experiments are given.

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Veröffentlicht in:Applied mechanics and materials 2017-09, Vol.870, p.120-125
Hauptverfasser: Sysoev, Evgeny V., Vykhristyuk, Ignat A., Kulikov, Rodion V., Shirokov, Vasiliy V.
Format: Artikel
Sprache:eng
Schlagworte:
Algorithms
Batch processing
Deconvolution
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Zusammenfassung:The way of the lateral resolution improvement for 3D nanorelief measurement is proposed. Algorithm for digital processing of measurement data based on deconvolution operation using Wiener filtration is presented. Results of theoretical researches, numerical and optical experiments are given.
ISSN:1660-9336
1662-7482
1662-7482
DOI:10.4028/www.scientific.net/AMM.870.120