Pressure-Driven Gas Flow through Nano-Channels at High Knudsen Numbers

Flow through nano-channels is important in several fields, ranging from natural porous media to microfluidics. It is therefore important to study the flow under controlled conditions. While quite a lot of work has been done on the flow of liquids through nano-channels, comparatively little systemati...

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Veröffentlicht in:	Journal of nano research 2017-11, Vol.50, p.116-127
Hauptverfasser:	Karakitsiou, Stamatina, Holst, Bodil, Hoffmann, Alex Christian
Format:	Artikel
Sprache:	eng
Schlagworte:	Argon Borosilicate glass Channels Gas flow Gas transport Innovations Ion etching Mass flow rate Mathematical models Microfluidics Porous media Reactive ion etching Silicon
Online-Zugang:	Volltext
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