On-line tuning system of multivariate dEWMA control based on a neural network approach

The double exponentially weighted moving average (EWMA) controller is a popular algorithm for on-line quality control of semiconductor manufacturing processes. The performance of the closed-loop system hinges on the adequacy of the two weight parameters of the double EWMA equations. In 2004, Su and...

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Veröffentlicht in:	International journal of production research 2008-07, Vol.46 (13), p.3459-3484
Hauptverfasser:	Fan, S.-K. S., Wang, C.-Y.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Control systems Controllers Exact sciences and technology Exponentially weighted moving average (EWMA) Multiple-input multiple-output (MIMO) system Neural network (NN) Inventory control, production control. Distribution Neural networks Operational research and scientific management Operational research. Management science Process adjustment Run-to-run control Semiconductors Simulation Studies
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