ASIC with Internally Generated Dynamic Magnetic Field Imitating External Moving Magnet

A magnetic microelectromechanical system with application specific integrated circuit using array of the Hall elements is presented. It is used for measurement of moving magnetic field, either for its rotary angle or for its linear position measurement. The advantage of the proposed method is to perform an onboard sensitivity testing of the Hall elements without using a complex external magnetic test setup. Evaluation of the integrated circuit is based the internally generated dynamic magnetic field which simulates external dynamic magnetic field. The simulations of the integrated circuit are supported by the measurement results. The verification of the realized system shows very similar behavior compared to the data acquired with the simulated models. Preferably acquired data of spatial distribution of the magnetic field could be used in the process of trimming to evaluate correction factors for offset and sensitivity of the Hall elements or the whole system to yield higher robustness.