Gas-Sensing Properties of Spinodally Decomposed (Ti,Sn)O2 Thin Films

The gas‐sensing properties of spinodally decomposed (Ti,Sn)O2 thin films on sapphire substrates were investigated for CO, C3H8, and C2H5OH, and hydrogen gases at a temperature of 500°C. The variation in the d‐spacing of the (101) plane of (Ti0.5Sn0.5)O2 films showed behavior that was typical of spin...

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Veröffentlicht in:	Journal of the American Ceramic Society 1999-01, Vol.82 (1), p.225-228
Hauptverfasser:	Arakawa, Shuichi, Mogi, Kenji, Kikuta, Ko-ichi, Yogo, Toshinobu, Hirano, Shin-ichi, Seki, Yoji
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures Electronic transport phenomena in thin films and low-dimensional structures Exact sciences and technology General equipment and techniques Instruments, apparatus, components and techniques common to several branches of physics and astronomy Physics Sensors (chemical, optical, electrical, movement, gas, etc.) remote sensing Structure and morphology thickness Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology
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Zusammenfassung:	The gas‐sensing properties of spinodally decomposed (Ti,Sn)O2 thin films on sapphire substrates were investigated for CO, C3H8, and C2H5OH, and hydrogen gases at a temperature of 500°C. The variation in the d‐spacing of the (101) plane of (Ti0.5Sn0.5)O2 films showed behavior that was typical of spinodal decomposition during annealing at a temperature of 900°C. Transmission electron micrographs of the spinodally decomposed (Ti,Sn)O2 films on sapphire (0112) substrates revealed the characteristic modulated structure. The modulated lamella microstructure consisted of TiO2‐ and SnO2‐rich regions at intervals of ∼10 nm. The films were very sensitive to hydrogen gas and revealed anisotropic electrical conduction that was influenced by the modulated microstructure, which is characteristic of spinodal decomposition.
ISSN:	0002-7820 1551-2916
DOI:	10.1111/j.1151-2916.1999.tb01749.x