Trace analysis for microelectronically relevant heavy metals in high-purity titanium with isotope dilution mass spectrometry

A method of isotope dilution mass spectroscopy used for the reliable determination of traces of relevant heavy metals in high-purity titanium primary materials is described.

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Bibliographische Detailangaben
Veröffentlicht in:	Analytical chemistry (Washington) 1993-11, Vol.65 (22), p.3199-3203
Hauptverfasser:	Beer, Bernhard, Heumann, Klaus G
Format:	Artikel
Sprache:	eng
Schlagworte:	Analytical chemistry Chemistry Exact sciences and technology Isotopes Metals Spectrometric and optical methods
Online-Zugang:	Volltext
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Beschreibung
Zusammenfassung:	A method of isotope dilution mass spectroscopy used for the reliable determination of traces of relevant heavy metals in high-purity titanium primary materials is described.
ISSN:	0003-2700 1520-6882
DOI:	10.1021/ac00070a006