Dual-Vessel Integrated Microwave Sample Decomposition and Digest Evaporation for Trace Element Analysis of Silicon Material by ICPMS:  Design and Application

A dual-vessel apparatus using closed-vessel microwave sample preparation is designed. A protocol that includes in situ reagent purification, sample decomposition, and digest evaporation has been developed. The essential chemistry mechanisms will be discussed in detail. Application of the method for analysis of trace amounts of chromium, nickel, copper, and zinc in polycrystalline silicon using inductively coupled plasma mass spectrometry (ICPMS) is demonstrated.