Temperature control system of excimer laser based on Smith prediction compensation

For large excimer laser temperature control system time lag characteristics, the use of excimer laser MATLAB temperature control system for model identification, design of a new composite predictor Smith-PID controller on the basis of two respectively. The controller is simulated and tested. The results show that compared with the conventional PID controller, the Smith-PID predicts that the composite controller has a 41% reduction in overshoot and a 51% reduction in regulation time. The controller is designed to be robust and overshoot. The small amount and short adjustment time can provide a good temperature control environment for the operation of excimer lasers.