Thin Films: Exploiting In Situ Redox and Diffusion of Molybdenum to Enable Thin‐Film Circuitry for Low‐Cost Wireless Energy Harvesting (Adv. Funct. Mater. 5/2019)
In article number 1806002, Rebecca L. Peterson and Youngbae Son report a simple process for simultaneous fabrication of thin film diodes and transistors using selective‐area reactions. In some regions, thermodynamically‐driven redox and diffusion of a molybdenum film during oxide semiconductor depos...
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Veröffentlicht in: | Advanced functional materials 2019-02, Vol.29 (5), p.n/a |
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Hauptverfasser: | , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | In article number 1806002, Rebecca L. Peterson and Youngbae Son report a simple process for simultaneous fabrication of thin film diodes and transistors using selective‐area reactions. In some regions, thermodynamically‐driven redox and diffusion of a molybdenum film during oxide semiconductor deposition forms a rectifying contact, whereas in areas without exposed metal, oxide transistors are made. RF wireless energy harvesting circuits are demonstrated. This work opens the door for future low‐cost, multi‐functional thin film electronics. |
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ISSN: | 1616-301X 1616-3028 |
DOI: | 10.1002/adfm.201970029 |