Electromagnetic silicon MEMS resonator

Electromagnetic silicon MEMS resonator

We have fabricated a silicon MEMS resonator aiming at multimodal sensors, and evaluated vibration characteristics by electromagnetic drive and induced electromotive force detection. The resonance frequency of the driving voltage of 0.6 Vpp shows torsional vibration of approximately 87 kHz, and the r...

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Veröffentlicht in:Electrical engineering in Japan 2019-01, Vol.206 (2), p.54-60
Hauptverfasser: Watanabe, Yoshiyuki, Yahagi, Toru, Abe, Yutaka, Murayama, Hiroki
Format: Artikel
Sprache:eng
Schlagworte:
Electric potential
electromagnetic drive
electromotive force detection
Electromotive forces
MEMS resonator
Microelectromechanical systems
multimodal sensor
Resonators
Silicon
Torsional vibration
vibration sensing
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Zusammenfassung:We have fabricated a silicon MEMS resonator aiming at multimodal sensors, and evaluated vibration characteristics by electromagnetic drive and induced electromotive force detection. The resonance frequency of the driving voltage of 0.6 Vpp shows torsional vibration of approximately 87 kHz, and the resonance frequency is shifted toward the low‐frequency side as the driving voltage increases. Resonance characteristics due to temperature change and film stress were evaluated.
ISSN:0424-7760
1520-6416
DOI:10.1002/eej.23154