Flow Sensor Based on the Snap-Through Detection of a Curved Micromechanical Beam

We report on a flow velocity measurement technique based on snap-through detection of an electrostatically actuated, bistable micromechanical beam. We show that induced elecro-thermal Joule heating, and the convective air cooling change the beam curvature and consequently, the critical snap-through...

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Veröffentlicht in:	Journal of microelectromechanical systems 2018-12, Vol.27 (6), p.945-947
Hauptverfasser:	Kessler, Yoav, Ilic, B. Robert, Krylov, Slava, Liberzon, Alex
Format:	Artikel
Sprache:	eng
Schlagworte:	Air cooling Crystals Curvature Curved beams Electric potential electrothermal effects Flow velocity fluid flow measurement Heating systems Measurement techniques Microsensors Ohmic dissipation Power consumption Reduced order models Resistance heating Sensitivity Sensors Single crystals Temperature sensors Velocity measurement Voltage measurement
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