Flow Sensor Based on the Snap-Through Detection of a Curved Micromechanical Beam

We report on a flow velocity measurement technique based on snap-through detection of an electrostatically actuated, bistable micromechanical beam. We show that induced elecro-thermal Joule heating, and the convective air cooling change the beam curvature and consequently, the critical snap-through voltage ( V_{\text {ST}} ). Using single crystal silicon beams, we demonstrate the snap-through voltage to flow velocity sensitivity of dV_{\text {ST}}/du \approx 0.13 V s m −1 with a power consumption of \approx 360~\mu \text{W} . Our experimental results were in accord with the reduced order, coupled, thermo-electro-mechanical model prediction. We anticipate that electrostatically induced snap-through in curved, micromechanical beams will open new directions for the design and implementation of downscaled flow sensors for autonomous applications and environmental sensors. [2018-0131]