P‐6.11: Sensor Technology ‐ A new chance for low generation TFT production line

We analyzed several sensor technology which have good compatibility with current TFF process, including Digital X‐Ray Detector, Glass‐substrate Pressure Sensor, Glass‐substrate Memory, Glass‐substrate Antenna and Glass‐substrate MEMS Devices. The above offers some directions for low generation TFT p...

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Veröffentlicht in:	SID International Symposium Digest of technical papers 2018-04, Vol.49 (S1), p.632-635
Hauptverfasser:	Wang, Zhidong, Lan, Ronghua, Zhou, Lijia, Zhang, Junrui, Yan, Rongjian, Cheng, Jiuyang, Zhou, Quanguo, Guo, Meng, Li, Yongqiang, Lu, Yancheng
Format:	Artikel
Sprache:	eng
Schlagworte:	Digital X-Ray Detector Glass substrates Glass-substrate Antenna Glass-substrate Memory Glass-substrate MEMS Devices Glass-substrate Pressure Sensor Microelectromechanical systems Pressure sensors Sensors Technology assessment
Online-Zugang:	Volltext
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Beschreibung
Zusammenfassung:	We analyzed several sensor technology which have good compatibility with current TFF process, including Digital X‐Ray Detector, Glass‐substrate Pressure Sensor, Glass‐substrate Memory, Glass‐substrate Antenna and Glass‐substrate MEMS Devices. The above offers some directions for low generation TFT production line's transition.
ISSN:	0097-966X 2168-0159
DOI:	10.1002/sdtp.12802