24.4: High Performance Top‐gate Self‐aligned Coplanar a‐IGZO TFTs with Light Shielding Metal Design

The TG‐SA a‐IGZO TFTs with different light shielding metal (SM) layers design were demonstrated and compared in this paper. Their electrical characteristics have been measured in order to systematically analyze the effect that the SMs ever made on. The relationship between device instability and dif...

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Veröffentlicht in:	SID International Symposium Digest of technical papers 2018-04, Vol.49 (S1), p.259-262
Hauptverfasser:	Song, Zhen, Wang, Guoying, Chen, Jiangbo, Gu, Pengfei, Liu, Fengjuan, Xie, Dini, Liu, Wei, Sun, Hongda, Song, Young Suk, Yan, Liangchen, Wu, Zhongyuan
Format:	Artikel
Sprache:	eng
Schlagworte:	a-IGZO TFTs Backplanes Diodes Indium gallium zinc oxide light shielding metal Organic light emitting diodes reliability Samarium Shielding Stability Stability analysis top-gate self-aligned coplanar structure
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Beschreibung
Zusammenfassung:	The TG‐SA a‐IGZO TFTs with different light shielding metal (SM) layers design were demonstrated and compared in this paper. Their electrical characteristics have been measured in order to systematically analyze the effect that the SMs ever made on. The relationship between device instability and different SMs design have been systematically analyzed. Then the prototype 14″ OLED display with an excellent performance using TG‐SA a‐IGZO TFTs backplane have been made successfully, which indicates an excellent mass‐production prospect.
ISSN:	0097-966X 2168-0159
DOI:	10.1002/sdtp.12696