Ti-TiN Multilayer Coatings Obtained by ION FLUX Surface Modification

We present a production technology for multilayer vacuum plasma coatings with additional ion bombardment, which is implemented with two methods: by using the hollow cathode effect and by using the self-maintained discharge generated by the plasma generator. Based on this technology, a technology of...

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Veröffentlicht in:	Solid state phenomena 2017-09, Vol.265, p.141-145
Hauptverfasser:	Migranov, M.S., Shekhtman, S.R.
Format:	Artikel
Sprache:	eng
Schlagworte:	Ion flux Multilayers
Online-Zugang:	Volltext
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Beschreibung
Zusammenfassung:	We present a production technology for multilayer vacuum plasma coatings with additional ion bombardment, which is implemented with two methods: by using the hollow cathode effect and by using the self-maintained discharge generated by the plasma generator. Based on this technology, a technology of producing multilayer coatings based on TiN was developed.
ISSN:	1012-0394 1662-9779 1662-9779
DOI:	10.4028/www.scientific.net/SSP.265.141