CVD growth of two-dimensional MoS2 depending on the location of the SiO2 substrates

Transition metal dichalcogenides, like MoS2, were attracted attention due to their optoelectronic properties. But fabrications of such materials still a challenge task. In this work, chemical vapor deposition (CVD) was used to synthesize two-dimensional MoS2 from S and MoO3 powders on SiO2. Lateral...

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Hauptverfasser: Zakharkina, E. I., Semenova, A. A., Boiakinov, E. F., Vinokurov, P. V., Smagulova, S. A.
Format: Tagungsbericht
Sprache:eng
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Zusammenfassung:Transition metal dichalcogenides, like MoS2, were attracted attention due to their optoelectronic properties. But fabrications of such materials still a challenge task. In this work, chemical vapor deposition (CVD) was used to synthesize two-dimensional MoS2 from S and MoO3 powders on SiO2. Lateral size of domains were up to 80 mkm and thickness of single-layered MoS2 was 0.9 nm. The structural and optical properties of the obtained two-dimensional MoS2 are studied. We find that the formation of MoS2 domains with different size is dependent on location of the SiO2 substrates.
ISSN:0094-243X
1551-7616
DOI:10.1063/1.5079366