Vacuum System Design of Ion Nitriding and PCVD Composite Treatment Furnace

Vacuum System Design of Ion Nitriding and PCVD Composite Treatment Furnace

Keywords: Ion Nitriding Vacuum System PCVDAbstract. Vacuum system design is an important part of the heat treatment furnace. In this paper, the vacuum system of ion nitriding and PCVD composite treatment furnace is advanced a complete and thorough design and calculation to select a vacuum system tha...

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Veröffentlicht in:Applied Mechanics and Materials 2013-10, Vol.448-453, p.3467-3471
Hauptverfasser: Weng, Z.Q., Peng, S.H., Zuo, Z.J., Fu, L.R., Bi, Si
Format: Artikel
Sprache:eng
Schlagworte:
Efficiency
Gases
Heat
Ion nitriding
Nitrogen
Systems design
Valves
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Zusammenfassung:Keywords: Ion Nitriding Vacuum System PCVDAbstract. Vacuum system design is an important part of the heat treatment furnace. In this paper, the vacuum system of ion nitriding and PCVD composite treatment furnace is advanced a complete and thorough design and calculation to select a vacuum system that is composed of mechanical booster pump and a mechanical vacuum pump, which is also called roots vaccum pumps—mechanical vacuum pumps.
ISSN:1660-9336
1662-7482
1662-7482
DOI:10.4028/www.scientific.net/AMM.448-453.3467