Improvement of the noise characteristics of the MEMS inertial systems based on the quad sensor structure and signal processing

Improvement of the noise characteristics of the MEMS inertial systems based on the quad sensor structure and signal processing

The paper discusses the quad sensor structure which is capable to improve the noise characteristics of MEMS inertial sensors. The background of the signal processing is described and the simulation results are shown to proof the theoretical equations.

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Bibliographische Detailangaben
Hauptverfasser: Rosen, Miletiev, Radostin, Kenov, Simeonov Ivaylo, Yordanov Rumen
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Background noise
Inertial sensing devices
Microelectromechanical systems
Signal processing
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Beschreibung
Zusammenfassung:The paper discusses the quad sensor structure which is capable to improve the noise characteristics of MEMS inertial sensors. The background of the signal processing is described and the simulation results are shown to proof the theoretical equations.
ISSN:0094-243X
1551-7616
DOI:10.1063/1.4854745